Interconnect structure and method for fabricating on-chip interconnect structures by image reversal

ABSTRACT

An interconnect structure includes a patterned and cured dielectric layer located directly on a surface of a patterned permanent antireflective coating. The patterned and cured dielectric layer and the permanent antireflective coating form shaped openings. The shaped openings include an inverse profile which narrows towards a top of the shaped openings. A conductive structure fills the shaped openings wherein the patterned and cured dielectric layer and the permanent antireflective coating each have a conductively filled region.

RELATED APPLICATION INFORMATION

This application is related to commonly assigned application Ser. No.______, entitled: SELF-ALIGNED AIRGAP INTERCONNECT STRUCTURES ANDMETHODS OF FABRICATION (Attorney Docket Number YOR92011022US1(163-394)), and commonly assigned application Ser. No. ______, entitled:MIDDLE OF LINE STRUCTURES AND METHODS FOR FABRICATION (Attorney DocketNumber YOR92011024US1 (163-395)), both filed concurrently herewith andincorporated herein by reference.

BACKGROUND

1. Technical Field

The present invention relates to semiconductor interconnect structuresand fabrication methods, and in particular to shaped interconnectstructures made by image reversal patterning.

2. Description of the Related Art

The speed of propagation of interconnect signals is an important factorcontrolling overall circuit speed as feature sizes are reduced and thenumber of devices per unit area and number of interconnect levels areincreased. Throughout the semiconductor industry, there has been astrong drive to reduce the dielectric constant, k, of the interlayerdielectric (ILD) materials used to electrically insulate metal lines. Asa result, interconnect signals travel faster through conductors due to areduction in resistance-capacitance (RC) delays.

Semiconductor chips may employ copper (Cu) as the electrical conductorinorganic organosilicates as the low dielectric constant (low-k)dielectric, and multiple levels of Cu/low-k interconnect layers. TheseCu/low-k interconnect layers are fabricated with an iterative additiveprocess, called dual-damascene, which includes several processing stepsincluding, for example, film deposition, patterning by lithography andreactive ion etching, liner (Cu barrier) deposition, Cu metal fill byelectrochemical plating, and chemical-mechanical polishing of excessiveCu metal.

Traditional dual-damascene integration suffers from poor reliability,particularly in porous low-k dielectric material. While hardmask layersmay serve to protect the low-k material, the presence of sacrificialhardmask layers adds enormous process complexity and manufacturing asadditional film deposition, pattern transfer etch, and removal of thehardmask layers are needed. Even with a hardmask, the process induceddielectric damage on the top surface of the dielectric results in adielectric breakdown at this region during electrical reliability tests.The processes that could induce dielectric damage include chemicalmechanical polishing, cleaning, and reactive ion etching.

A back-end-of-the-line (BEOL) integration process, called a lowtemperature oxide (LTO) process, employs a plurality of layers (e.g., upto 8) of sacrificial hardmask materials to fabricate a two-layerdual-damascene interconnect structure. Although immensely popular insemiconductor manufacturing, the dual-damascene integration schemesuffers from several drawbacks including the following. Thedual-damascene integration scheme constitutes a significant portion ofmanufacturing cost of advanced semiconductor chips as many layers areneeded to form connections. The dual-damascene integration scheme is amain yield detractor as the many layers of films needed to form theinterconnects generates opportunities for defect introduction and, thus,degrade manufacturing yields. The dual damascene integration is veryinefficient and embodies enormous complexity. The current dual-damasceneintegration scheme requires many sacrificial films (e.g., 80% of thefilm stack) to pattern and protect the fragile interlayer dielectricfilms from damage during processing. These sacrificial patterning andprotective films have to be removed after patterning and copper plating.

In addition, the performance gain by introduction of new lower-kmaterials is often offset by the need for higher-k non-sacrificialprotective materials, such as a cap layer, a hardmask layer, or athicker copper barrier layer. The complex dual-damascene processlengthens manufacturing turn-around time and development cycles. Plasmaetching processes for the dual-damascene integration scheme are alsoexpensive and require significant up-front capital investment. Theprocess induced dielectric damage can cause degradation in performanceand reliability of the resultant chips.

SUMMARY

An interconnect structure includes a patterned and cured dielectriclayer located directly on a surface of a patterned permanentantireflective coating. The patterned and cured dielectric layer and thepermanent antireflective coating form shaped openings. The shapedopenings include a sidewall having a tapered profile angle which narrowstowards a top of the shaped openings. A conductive structure fills theshaped openings wherein the patterned and cured dielectric layer and thepermanent antireflective coating each have a conductively filled region.The conductively filled region includes a shaped interconnect structurethat offers the advantages of a longer distance between adjacentconductively filled regions (as compared with traditional near squarestructures), thus improving electrical reliability. The interconnectfabrication process preferably forms the shaped interconnect structuresby image reversal patterning technique.

A method for fabricating an interconnect structure includes forming apermanent antireflective coating on a substrate; forming a pattern ofshaped photoresist structures having a profile which narrows towards atop of the shaped structures directly on the permanent antireflectivecoating; filling spaces between the shaped photoresist structures withan interlevel dielectric composition wherein without substantiallyaltering a shape and size of the shaped photoresist structures, and theinterlevel dielectric composition includes a material that becomes apermanent interlevel dielectric layer; removing the shaped photoresiststructures to provide shaped openings to form a reverse image pattern inthe interlevel dielectric composition, the shaped openings having aninverse profile which narrows towards a top of the shaped openings; andfilling the vias and trenches with an electrically conductive fillmaterial.

Another method for fabricating an interconnect structure includes foilling first shaped photoresist structures in a first photoresist whereinthe first shaped photoresist structures include a profile which narrowstowards a top of the shaped photoresist structures; filling spacesbetween the first shaped photoresist structures with a first interleveldielectric composition wherein the filling does not substantially altera shape and size of the first shaped photoresist structures and thefirst interlevel dielectric composition includes a material to become afirst permanent interlevel dielectric layer; removing the first shapedphotoresist structures to provide a reverse image pattern forming firstshaped openings in the first interlevel dielectric composition, thefirst shaped openings including an inverse profile which narrows towardsa top of the first shaped openings; forming second photoresiststructures in a second photoresist on top of the first permanentinterlevel dielectric layer; filling spaces between the secondphotoresist structures with a second interlevel dielectric compositionwherein the filling does not substantially alter a shape and size of thesecond photoresist structures and the second interlevel dielectriccomposition includes a material to become a permanent interleveldielectric layer; removing the second photoresist structures to formsecond shaped openings to provide a reverse image pattern for forminginterconnect structures; and filling the reverse image pattern of thepermanent first and second interlevel dielectric layers with anelectrically conductive fill material to form interconnect structures.

These and other features and advantages will become apparent from thefollowing detailed description of illustrative embodiments thereof,which is to be read in connection with the accompanying drawings.

BRIEF DESCRIPTION OF DRAWINGS

The disclosure will provide details in the following description ofpreferred embodiments with reference to the following figures wherein:

FIGS. 1A-1J show cross-sectional views of a device demonstrating aprocess flow for a single-damascene process according to an illustrativeembodiment;

FIGS. 2A-2D show cross-sectional views of a device demonstrating anotherprocess flow for a single-damascene process according to anotherillustrative embodiment;

FIG. 3A-3F show cross-sectional views of a device demonstrating aprocess flow for a dual-damascene process according to an illustrativeembodiment;

FIG. 4A-4D show cross-sectional views of the device of FIG. 3Fdemonstrating a process flow for forming air gaps between conductivedual-damascene structures according to an illustrative embodiment;

FIGS. 5A-5B show cross-sectional views of single damascene structureswith sidewalls having an inverse vertical profile and with air gaps(FIG. 5B) formed in accordance with one illustrative embodiment; and

FIG. 6 shows a cross-sectional view of a device having conductivestructures with an inverse profile and with air gaps formed inaccordance with one illustrative embodiment.

DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS

The present principles provide shaped interconnect structures andmethods for fabrication. In particularly useful embodiments, single-anddual-damascene shaped interconnect structures are formed by imagereversal patterning wherein shaped interconnect structures are formed inresist structures in a shape that narrows towards a top. The top is theportion away from or opposite the substrate. The resist structures areburied in an interlevel dielectric composition. The resist structuresare removed from the interlevel dielectric composition and theinterlevel dielectric composition becomes or is changed by a cureprocess into a permanent patterned on-chip dielectric.

Advantages of the present invention include: 1) providing shapedinterconnect structures for improved electrical reliability as thedistance between the metal at the top of a particular dielectric levelis greater than for traditional (square) structures; 2) simplifyingintegration processes as reactive ion etching and its related hardmaskare not needed and thus saving manufacturing costs; 3) reactive ionetching (RIE) is not needed to form the shaped interconnect structured,thus reducing dielectric damage by RIE and improving performance andreliability. Moreover, the methods disclosed herein also afford shapedinterconnect structures that are not possible to fabricate withtraditional reactive ion etching techniques.

The image reversal patterning technique permits the formation ofcustomizable opening shapes. The opening shapes are employed (as reverseimages) to be filled by conductive material to form single or dualdamascene conductive structures. This flexibility permits the control ofthe conductor shape. In one embodiment, a single or dual damascenestructure has a trapezoidal cross-sectional shape. When the conductivestructures tapers toward its top (e.g., trapezoidal cross-sectionalshape), the profile may be referred to as an inverse profile. Single ordual damascene structures typically fail at a top layer of thedielectric between metal structures in each metal layer. The inverseconductor profile extends the distance between two adjacent metalstructures within each metal layer at top of the structure. This longerdistance effectively reduces the applied electrical field, thus greaterreliability can be achieved.

An antireflective coating (ARC) may be employed in some embodiments. Anillustrative method for fabricating, e.g., a dual damascene structure,in accordance with one illustrative embodiments may include, optionally,depositing an anti-reflective layer on a substrate, depositing a firstpositive- or negative-tone photoresist and performing a pattern-wiseexposure to irradiation with an inversed-tone mask, e.g. UV light, EUV,E-beam. Patterns (e.g., pillar or line) are formed by selective removalof the unexposed areas (e.g., development) to form first beneficialphotoresist shapes. Then, the first photoresist pattern is filled withan interlevel dielectric (ILD) composition without substantiallyaltering the shape and the size of the photoresist patterns. Excess ILDmay be removed by a wet or dry method to expose the top surface of thefirst photoresist pattern.

An inverted ILD pattern is formed by removing remaining resist with awet or dry method, and depositing a second positive- or negative-tonephotoresist followed by pattern-wise exposure to irradiation with aninversed-tone mask, e.g. UV light, EUV, E-beam, etc. Second resistpatterns are formed by selective removal of the exposed (or unexposed)areas (e.g., development). The second patterned resist/ILD composite isformed by filling the openings of first and second resist patterns withan ILD. An inverse tone ILD dual damascene pattern is formed by removingremaining resist with a wet or dry method. The dual damascene ILDstructure may be cured by heat and/or irradiation energy (heat, UV,electron beam, microwave or a combination thereof). Additional steps mayinclude standard, cap layer/ARC layer opening, metallization, chemicalmechanical polishing (CMP), cap layer deposition, etc. Thedual-damascene dielectric interconnect is filled with a conductive fillmaterial.

In some embodiments, an antireflective coating is formed on thesemiconductor substrate prior to depositing the photoresist. In someembodiments, when an ARC is used, the ARC and patternable low-kmaterials are part of a permanent dielectric material stack of theinterconnect structure.

In another embodiment, a material stack comprising a dielectric cap andan antireflective coating is formed on top of the substrate prior todepositing the photoresist. When such materials are present, a step offorming contact holes through the antireflective coating or materialstack may be performed. The contact holes enable subsequent contact tothe underlying substrate.

A planarization process such as chemical mechanical polishing may followthe interconnect pattern fill with a conductive material. In anotherembodiment, a dielectric cap may be formed atop the cured secondpatternable material after filling and planarizing.

In accordance with the present principles, a number of photoresist stepsand all other sacrificial materials and their related deposition,pattern transfer (etch) and removal process used in prior artintegration are reduced. In addition, the need for plasma etching, whichis typically employed in patterning processes, is minimized. The reduceduse of plasma etching reduces plasma-induced dielectric material damage,thus maintaining the performance gain for the introduction of lowerdielectric constant on-chip insulators. Further, the methods asdescribed herein reduce a number of layers needed to fabricate aninterconnect structure and, as such, reduce the time and cost offabricating interconnect structures as compared to prior art processes.

In the following description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps and techniques, to provide a thorough understanding ofthe present principles. However, it will be appreciated by one ofordinary skill in the art that these specific details are illustrativeand should not be construed as limiting.

It will be understood that when an element as a layer, region orsubstrate is referred to as being “on” or “over” another element, it canbe directly on the other element or intervening elements may also bepresent. In contrast, when an element is referred to as being “directlyon” or “directly over” another element, there are no interveningelements present. It will also be understood that when an element isreferred to as being “connected” or “coupled” to another element, it canbe directly connected or coupled to the other element or interveningelements may be present. In contrast, when an element is referred to asbeing “directly connected” or “directly coupled” to another element,there are no intervening elements present.

As mentioned above, the interlayer dielectric materials employed hereinmay act as a low-k (low dielectric constant) dielectric insulator aftera cure process. The cured product of an interlayer dielectric material,therefore, can serve as an on-chip dielectric insulator. The terms“cure” or “curing” are used interchangeable to refer to one of theprocesses selected from a thermal cure, an electron beam cure, anultra-violet (UV) cure, an ion beam cure, a plasma cure, a microwavecure or a combination thereof. A “cured” product of an interlayerdielectric material is the product of the interlayer dielectric materialafter it has undergone a cure process. The “cured” product of aninterlayer dielectric material may be different from the originalinterlayer dielectric material in chemical nature and physical,mechanical and electrical properties.

It is to be understood that the present invention will be described interms of a given illustrative architecture having a semiconductor waferor substrate; however, other architectures, structures, substratematerials and process features and steps may be varied within the scopeof the present invention.

Circuits or structures as described herein may be part of a design foran integrated circuit chip. The chip design may be created in agraphical computer programming language, and stored in a computerstorage medium (such as a disk, tape, physical hard drive, or virtualhard drive such as in a storage access network). If the designer doesnot fabricate chips or the photolithographic masks used to fabricatechips, the designer may transmit the resulting design by physical means(e.g., by providing a copy of the storage medium storing the design) orelectronically (e.g., through the Internet) to such entities, directlyor indirectly. The stored design is then converted into the appropriateformat (e.g., GDSII) for the fabrication of photolithographic masks,which typically include multiple copies of the chip design in questionthat are to be formed on a wafer. The photolithographic masks areutilized to define areas of the wafer (and/or the layers thereon) to beetched or otherwise processed.

The methods as described herein may be used in the fabrication ofintegrated circuit chips. The resulting integrated circuit chips can bedistributed by the fabricator in raw wafer form (that is, as a singlewafer that has multiple unpackaged chips), as a bare die, or in apackaged form. In the latter case the chip is mounted in a single chippackage (such as a plastic carrier, with leads that are affixed to amotherboard or other higher level carrier) or in a multichip package(such as a ceramic carrier that has either or both surfaceinterconnections or buried interconnections). In any case the chip isthen integrated with other chips, discrete circuit elements, and/orother signal processing devices as part of either (a) an intermediateproduct, such as a motherboard, or (b) an end product. The end productcan be any product that includes integrated circuit chips, ranging fromtoys and other low-end applications to advanced computer products havinga display, a keyboard or other input device, and a central processor.

The described embodiments demonstrate image reversal processes. An imagereversal is where positively formed (e.g., mask lines, resist lines orfeatures etc.) features will result in negative features being formed(e.g., vias and trenches) and vise versa. The negative features in thepresent embodiments will then be employed for forming interconnectstructures or the like. The interconnect structures are formed withoutetching interlevel dielectric layers to form trenches or vias. Instead,photoresists are employed to shape these trenches or vias and mayfunction as a permanent interlevel dielectric layer as well. Inaddition, the interlevel dielectric material can be formed to provide aplurality of different vertical profiles.

Referring now to the drawings in which like numerals represent the sameor similar elements and initially to FIGS. 1A-1J, a single-damascenemethod and structure 100 are shown in accordance with one illustrativeembodiment. FIG. 1A shows a substrate 102 having an optional cap layer104 and optional antireflection coating (ARC) 106 formed over thesubstrate 102. Although both layers 104 and 106 are shown, it should beunderstood that the cap layer 104 and ARC 106 may be employed withoutthe other or may not be used at all.

The substrate 102 may include a semiconductor substrate, e.g., siliconGaAS, silicon on insulator, or may include lower levels metal layers ininterlevel dielectric materials. The substrate 102 may include anelectrically semiconducting material, an insulating material, aconductive material, devices or structures made of these materials orany combination thereof (e.g., a lower level of an interconnectstructure). When the substrate 102 is comprised of a semiconductingmaterial, any semiconductor such as Si, SiGe, SiGeC, SiC, Ge alloys,GaAs, InAs, InP and other III/V or II/VI compound semiconductors, ororganic semiconductors may be employed. The substrate 102 may also be aflexible substrate including devices that are suitable for high-speedroll-to-roll processing. In addition to these listed types ofsemiconducting materials, substrate 102 may also be a layeredsemiconductor such as, for example, Si/SiGe, Si/SiC,silicon-on-insulators (SOIs) or silicon germanium-on-insulators (SGOIs).These semiconductor materials may form a device, or devices orstructures, which may be discrete or interconnected. These devices anddevice structures may be for computation, transmission, storage ordisplay of information, such as logic devices, memory devices, switchesor display devices.

When the substrate 102 is an electrical insulating material, theinsulating material can be an organic insulator, an inorganic insulatoror a combination thereof including multilayers. The substrate 102 mayalso include a patternable low-k dielectric material as well. Theseelectrical insulating materials may be part of a device, or devices orstructures, which may be discrete or interconnected. These devices andstructures may be for logic applications or memory applications. Whenthe substrate 102 is an electrically conducting material, the substratemay include, for example, polysilicon, an elemental metal, an alloyincluding at least one elemental metal, a metal silicide, a metalnitride or combinations thereof including multilayers. When thesubstrate 100 includes a semiconducting material, one or moresemiconductor devices such as, for example, complementary metal oxidesemiconductor (CMOS) devices, strained silicon devices, carbon-based(carbon nanotubes and/or graphene) devices, phase-change memory devices,magnetic memory devices, magnetic spin switching devices, singleelectron transistors, quantum devices, molecule-based switches and otherswitching or memory devices that can be part of an integrated circuit,can be fabricated thereon.

The optional cap 104 may be formed on the surface of substrate 102utilizing a conventional deposition process such as, for example,chemical vapor deposition (CVD), plasma enhanced chemical vapordeposition (PECVD), atomic layer deposition (ALD), chemical solutiondeposition (such as spin coating), or evaporation. The dielectric cap104 may include any suitable dielectric capping material such as, forexample, SiC, SiN, SiO₂, a carbon doped oxide, a nitrogen and hydrogendoped silicon carbide SiC(N,H) or multilayers thereof. Dielectric cap104 may be a continuous layer or a discontinuous layer. Dielectric cap104 may also be a layer with graded composition in the verticaldirection, or dielectric cap 104 may be a select cap, such as CoWP.

After the deposition of the dielectric cap 104, a post depositiontreatment may be applied to modify the properties of either the entirelayer or the surface of the dielectric cap 104. This post depositiontreatment can be selected from heat treatment, irradiation ofelectromagnetic wave (such of ultra-violet light), particle beam (suchas an electron beam, or an ion beam), plasma treatment, chemicaltreatment through a gas phase or a liquid phase (such as application ofa monolayer of surface modifier) or any combination thereof. Thispost-deposition treatment can be blanket or pattern-wise. The postdeposition treatment enhances the chemical, physical, electrical, and/ormechanical properties of the dielectric cap 104, such as adhesionstrength. The chemical properties include nature and/or location ofsurface functional groups, and hydrophilicity. The physical propertiesinclude density, moisture absorption, and heat conductivity. Themechanical properties include modulus, hardness, cohesive strength,toughness, resistance to crack and adhesion strength to its neighboringlayers. The electrical properties include dielectric constant,electrical breakdown field, and leakage current.

The heat treatment should be no higher than the temperature that theunderlying substrate 102 can withstand, usually about 500° C. This heattreatment can be conducted in an inert environment or within a chemicalenvironment in a gas phase or a liquid phase. This treatment step may ormay not be performed in the same tool as that used in forming thedielectric cap 104.

The post deposition treatment by irradiation of electromagnetic wavescan be by ultra-violet (UV) light, microwave and the like. The UV lightcan be broadband with a wavelength range from 100 nm to 1000 nm. It canalso be UV light generated by an excimer laser or other UV light source.The UV treatment dose can be a few mJ/cm² to thousands of J/cm². Thisirradiation treatment can be conducted at ambient temperature or at anelevated temperature no higher than 500° C. This irradiation treatmentcan be conducted in an inert environment or within a chemicalenvironment in a gas phase or a liquid phase. The following conditionsmay be employed in some embodiments: a radiation time from 10 sec to 30min, a temperature from room temperature to 500° C., and an environmentincluding vacuum, or gases such as, for example, inert gas, N₂, H₂, O₂,NH₃, hydrocarbon, and SiH₄. This treatment step may or may not beperformed in the same tool as that used in forming the dielectric cap104.

The post deposition treatment by plasma treatment can be selected fromoxidizing plasma, reducing plasma or a neutral plasma. Oxidizing plasmasinclude, for example, O₂, CO, and CO₂. Reducing plasmas include, forexample, H₂, N₂, NH₃, and SiH₄. The neutral plasmas include, forexample, Ar and He. A plasma treatment time from 1 sec to 10 min and aplasma treatment temperature from room temperature to 400° C. can beemployed. This treatment step may or may not be performed in the sametool as that used in forming the dielectric cap 104.

The post deposition chemical treatment may also be conducted in a gasphase or a liquid phase. In one embodiment, the following conditions maybe employed: a treatment time from 1 sec to 30 min, a temperature fromroom temperature (i.e., from 20° C. to 30° C.) to 500° C. Chemicalssuitable for this chemical treatment may be selected from any chemicalsthat improve chemical, physical, electrical, and/or mechanicalproperties of the dielectric cap layer, such as adhesion strength. Thischemical treatment may penetrate the entire layer of dielectric cap 104or may be limited only to the surface of the dielectric cap 104. Examplechemicals include adhesion promoters such as silanes, siloxanes andsilylation agents. This treatment step may or may not be performed inthe same tool as that used in forming the dielectric cap 104.

The thickness of the dielectric cap 104 may vary depending on thetechnique used to form the same as well as the material make-up of thelayer. The dielectric cap 104 may have a thickness from 2 nm to 55 nm,and more preferably a thickness from 10 mn to 45 nm.

Next, the optional ARC 106 is formed on a surface of the optionaldielectric cap 104, if present, or directly on a surface of thesubstrate 102 when the dielectric cap 104 is not present. The ARC 106may be a single layer, multilayer or a graded layer with a compositionthat varies along the vertical direction. The ARC 106: (i) acts as anantireflective coating (ARC) during a lithographic patterning process;(ii) withstands high-temperature back-end-of line (BEOL) integrationprocessing (e.g., up to about 500° C.); (iii) prevents resist (e.g., thepatternable low-k material) poisoning by the substrate 102; (iv)provides a vertical wall profile and sufficient etch selectivity betweenthe patternable low-k material and the ARC layer 106; (v) serves as apermanent dielectric layer in a chip (low dielectric constant, e.g.,k<5, more commonly k<3.6); and (vi) is compatible with conventional BEOLintegration and produces reliable hardware.

Antireflective coatings are known to those skilled in the art andinclude, for example, organic homopolymers or copolymers of polyesters,polyimides, polyacrylates, polymethacrylates, polysulfones, andamorphous carbon that satisfy all of the characteristics of ARC 106mentioned above. The ARC 106 may be applied by spin-on techniques, sprayon techniques, dipping, etc. Inorganic antireflective coatings, such assilicon oxynitride (SiON), silicon carbide (SiC), silicon oxycarbide(SiOC), SiCOH, siloxane, silane, carbosilane, oxycarbosilane, andsilsesquioxane, either as a polymer or a copolymer may also be employedand may be deposited, for example, by plasma-enhanced chemical vapordeposition, spin-on techniques, dipping, etc. The ARC 106 may includeatoms of M, carbon (C) and hydrogen (H), wherein M is at least one ofSi, Ge, B, Sn, Fe, Ta, Ti, Ni, Hf and La.

When ARC 106 is a multilayer ARC, the deposition of each layer may bethe same or a combination of deposition methods can be used. Afterapplying ARC 106, particularly those from a liquid phase, a postdeposition baking step is usually needed to remove unwanted components,such as solvent, and to effect crosslinking. The post deposition bakingstep of ARC 106 is typically, but not necessarily always, performed at atemperature from 80° C. to 300° C., with a baking temperature from 120°C. to 200° C. being even more typical. Other post-deposition treatments(e.g., similar too cap layer 104) may be performed.

In FIG. 1B, a photoresist material 108 is deposited. The material 108may include chemically amplified photoresists, non-chemically amplifiedphotoresists, positive-tone or negative tone. Processing of material 108may include a deposition process including, for example,spin-on-coating, dip coating, brush coating, and ink-jet dispensing.After applying the material 108, a post deposition baking step may beperformed to remove unwanted components, such as solvent. Whenperformed, the baking step is conducted at a temperature from 40° C. to200° C., with a baking temperature from 60° C. to 140° C. being evenmore preferred. The duration of the baking step varies from 10 secondsto 600 seconds and is not critical.

The thickness of the material 108 may vary depending on the requirementsof a chip being fabricated, the method being employed to form the same,and the make-up of the material 108. The photoresist material 108 mayhave a thickness from 1 nm to 50,000 nm, with a thickness from 20 nm to5000 nm being preferred. The pattern-wise exposing process can beaccomplished in a variety of ways, including, for example, exposurethrough a mask with a lithography stepper or a scanner with an exposurelight source of G-line, I-line (365 nm), DUV (248 nm, 193 nm, 157 nm,126 nm), Extreme UV (EUV) (13.4 nm, 6.5nm), an electron beam, an ionbeam, etc. The exposing process may be performed in a dry mode or animmersion mode. The exposing process may be performed with a singleexposure or multiple exposures. The pattern-wise exposing process mayinclude direct writing without the use of a mask with, for example,light, electron beam, ion beam, and scanning probe lithography. Otherpatterning techniques that can be used include contact printingtechniques such as nanoimprint lithography, embossing, micro contactprinting, replica molding, microtransfer molding, micromolding incapillaries and solvent-assisted micromolding, thermal assistedembossing, inject printing, and the like.

An optional post-exposure baking may be employed to effect thephotochemical reactions. When performed, the baking step is conducted ata temperature from 60° to 200° C., with a baking temperature from 80° to140° C. being even more typical. The duration of the baking step variesand is not critical to the practice of the present invention.

Referring to FIG. 1C, a reversed-tone mask and a positive- ornegative-tone photoresist 108 are employed to form features 110 withvias or trenches therebetween. The features 110 provide a reverse imagefor the later formed interconnect vias and trenches. Since thephotoresist features 110 are patterned using lithographic methods, thepattern features 110 may be formed with a plurality of different shapes.In one embodiment, the shapes include a trapezoidal cross-section asdepicted.

After exposure and post-exposure baking, latent images or patterns aredeveloped into relief images or patterns 110 with an appropriatedeveloper, usually an aqueous base solution, such as, e.g., 0.26 Ntetramethylammoniahydroxide (TMAH) solution.

Referring to FIG. 1D, an interlevel dielectric (ILD) 112 is deposited.The deposition process includes, for example, spin-on-coating, dipcoating, brush coating, doctor blade coating, and ink-jet dispensing.The ILD 112 is formulated such that it is compatible with the underlyingphotoresist pattern 110, i.e., the application of the ILD 112 does notsubstantially alter the dimension and profile of the resist patterns110. After applying the ILD material, a post deposition baking step maybe employed to remove unwanted components, such as solvent. Whenperformed, the baking step is conducted at a temperature from 40° C. to200° C., with a baking temperature from 60° C. to 140° C. being evenmore preferred. The duration of the baking step varies from 10 secondsto 600 seconds and is not critical.

The ILD 112 includes any dielectric material compositions that arecompatible with the pattern photoresist structures. In one embodiment,the ILD 112 may be used as deposited as a permanent ILD. In anotherembodiment, the ILD 112 may be cured to form a patterned permanentdielectric (e.g., the ILD 112 is a photo-patternable low k (PPLK)material). It is noted that the photo-patternable low k materials aresubsequently converted into a low-k dielectric insulator during a postpatterning cure process. The cured product of a PPLK material,therefore, can serve as a permanent on-chip dielectric insulator. Thephoto-patternable low k material employed herein can be deposited from aliquid phase. In the present disclosure, the terms “cure” or “curing”are used interchangeable to refer one of the processes selected from athermal cure, an electron beam cure, an ultra-violet (UV) cure, an ionbeam cure, a plasma cure, a microwave cure or a combination thereof.

A “cured” product of a photo-patternable low k material is the productof the photo-patternable low k material after it has undergone one ofthe aforementioned cure processes. The “cured” product of aphoto-patternable low k material is different from the photo-patternablelow k material in chemical nature and physical, mechanical andelectrical properties.

The term “photo-patternable low k material” (or PPLK) includes afunctionalized polymer, copolymer or blend including at least two of anycombination of polymers and/or copolymers having one or moreacid-sensitive imageable groups. The PPLK material acts as a photoresistand after curing it is converted into a dielectric material having adielectric constant of about 4.3 or less. It is noted that when the PPLKmaterial is comprised of a polymer, the polymer includes at least onemonomer (to be described in greater detail below). When the PPLKmaterial is comprised of a copolymer, the copolymer includes at leasttwo monomers (to be described in greater detail below). The blends ofpolymers and/or copolymers include at least two of any combination ofpolymers and/or copolymers described herein.

The PPLK material is a photo-patternable composition including apolymer, a copolymer, or a blend including at least two of anycombination of polymers and/or copolymers, wherein the polymers includeone monomer and the copolymers include at least two monomers and whereinthe monomers of the polymers and the monomers of the copolymers areselected from a siloxane, silane, carbosilane, oxycarbosilane,silsesquioxane, alkyltrialkoxysilane, tetra-alkoxysilane, unsaturatedalkyl substituted silsesquioxane, unsaturated alkyl substitutedsiloxane, unsaturated alkyl substituted silane, an unsaturated alkylsubstituted carbosilane, unsaturated alkyl substituted oxycarbosilane,carbosilane substituted silsesquioxane, carbosilane substitutedsiloxane, carbosilane substituted silane, carbosilane substitutedcarbosilane, carbosilane substituted oxycarbosilane, oxycarbosilanesubstituted silsesquioxane, oxycarbosilane substituted siloxane,oxycarbosilane substituted silane, oxycarbosilane substitutedcarbosilane, and oxycarbosilane substituted oxycarbosilane.

More specifically, the PPLK material that can be employed is aphoto-patternable composition comprising a photo/acid-sensitive polymerof one monomer or a copolymer of at least two monomers selected fromsiloxane, silane, carbosilane, oxycarbosilane, organosilicates,silsesquioxanes and the like. The PPLK material may also be aphoto-patternable composition comprising a polymer of one monomer or acopolymer of at least two monomers selected from alkyltrialkoxysilane,tetra-alkoxysilane, unsaturated alkyl (such as vinyl) substitutedsilsesquioxane, unsaturated alkyl substituted siloxane, unsaturatedalkyl substituted silane, an unsaturated alkyl substituted carbosilane,unsaturated alkyl substituted oxycarbosilane, carbosilane substitutedsilsesquioxane, carbosilane substituted siloxane, carbosilanesubstituted silane, carbosilane substituted carbosilane, carbosilanesubstituted oxycarbosilane, oxycarbosilane substituted silsesquioxane,oxycarbosilane substituted siloxane, oxycarbosilane substituted silane,oxycarbosilane substituted carbosilane, and oxycarbosilane substitutedoxycarbosilane.

Additionally, the PPLK material may comprise a blend including at leasttwo of any combination of polymers and/or copolymers, wherein thepolymers include one monomer and the copolymers include at least twomonomers and wherein the monomers of the polymers and the monomers ofthe copolymers are selected from a siloxane, silane, carbosilane,oxycarbosilane, silsesquioxane, alkyltrialkoxysilane,tetra-alkoxysilane, unsaturated alkyl substituted silsesquioxane,unsaturated alkyl substituted siloxane, unsaturated alkyl substitutedsilane, an unsaturated alkyl substituted carbosilane, unsaturated alkylsubstituted oxycarbosilane, carbosilane substituted silsesquioxane,carbosilane substituted siloxane, carbosilane substituted silane,carbosilane substituted carbosilane, carbosilane substitutedoxycarbosilane, oxycarbosilane substituted silsesquioxane,oxycarbosilane substituted siloxane, oxycarbosilane substituted silane,oxycarbosilane substituted carbosilane, and oxycarbosilane substitutedoxycarbosilane.

Optionally, the PPLK material may be a photo-patternable compositionfurther comprising at least one microscopic pore generator (porogen).The pore generator may be or may not be photo/acid sensitive.

Illustrative polymers for the PPLK material include, but are not limitedto, siloxane, silane, carbosilane, oxycarbosilane, silsesquioxane-typepolymers including caged, linear, branched or combinations thereof. Inone embodiment, the PPLK material is a photo-patternable compositioncomprising a blend of these photo/acid-sensitive polymers.

The PPLK material is formed from a photo-patternable composition(negative-tone or positive-tone) that includes at least one of the abovementioned polymers, copolymers or blends, a photoacid generator, a baseadditive and a solvent used in a photoresist composition. When the PPLKmaterial is a negative-tone photo-patternable material, it may be formedfrom a patternable composition optionally including an additionalcross-linker. By “negative-tone” it is meant that the part of the PPLKmaterial that is exposed to an actinic irradiation will not be removedby a conventional developer, while the unexposed part of the PPLKmaterial is removed.

The additional cross-linker can be a small compound (as compared with apolymer or copolymer) or a polymer, a copolymer, or a blend including atleast two of any combination of polymers and/or copolymers, wherein thepolymers include one monomer and the copolymers include at least twomonomers and wherein the monomers of the polymers and the monomers ofthe copolymers are selected from a siloxane, silane, carbosilane,oxycarbosilane, silsesquioxane, alkyltrialkoxysilane,tetra-alkoxysilane, unsaturated alkyl substituted silsesquioxane,unsaturated alkyl substituted siloxane, unsaturated alkyl substitutedsilane, an unsaturated alkyl substituted carbosilane, unsaturated alkylsubstituted oxycarbosilane, carbosilane substituted silsesquioxane,carbosilane substituted siloxane, carbosilane substituted silane,carbosilane substituted carbosilane, carbosilane substitutedoxycarbosilane, oxycarbosilane substituted silsesquioxane,oxycarbosilane substituted siloxane, oxycarbosilane substituted silane,oxycarbosilane substituted carbosilane, and oxycarbosilane substitutedoxycarbosilane.

When the PPLK material is a positive-tone photo-patternable material, itis formed from a patternable composition that includes at least one ofthe above mentioned polymers, copolymers or blends wherein the polymers,copolymers or blends containing at least photo/acid imageable functionalgroup to form positive-tone patterns, a photoacid generator, a baseadditive and a solvent used in a photoresist. By ‘positive-tone” it ismeant that the part of the PPLK material that is exposed to an actinicirradiation will be removed by a conventional developer, while theunexposed part of the PPLK material is not removed. The photoacidgenerators, base additives and solvents are well known to those skilledin the art.

Referring to FIG. 1E, the ILD 112 is polished or etched down to thepattern 110 to remove excess ILD 112 by dry etching, wet etching,polishing or other methods to expose a resist top surface 111. Thispolishing or etching provides access to the resist pattern structure 110to enable removal. The resist pattern 110 may be removed by a wetmethod, a dry method, heat, UV light or a combination thereof In oneembodiment, a wet method is employed with an appropriate developer. Inanother embodiment, a dry method is employed with an appropriateselective reactive ion etching that removes only the exposed resist. Inyet another embodiment, a dry method is employed by using heat or UVirradiation to remove exposed resist. These selective removal methodsleave desired trapezoidal openings 114 (FIG. 1F) within the dielectriclayer 112 wherein the shaped openings include a profile which narrowstowards a top of the shaped opening structures.

Referring to FIG. 1F, the absence of resist pattern 110 leaves openings114 that form an interconnect pattern 118 (see FIG. 1G). The openings114 have the patterned shape previously created. The patterneddielectric structure is formed by removing the resist 110 and curing theILD 112 composite structures. The curing is optional depending onmaterial selection for ILD 112 and may be performed with heat, UV, orE-beam (tone inversion in ILD) to form a permanent (cured) interconnectdielectric layer 116. After forming the interconnect pattern of shapedopenings 118 (and curing to form the ILD 116, if needed), a patterned(and cured) dielectric material 116, as shown in FIG. 1G, provides apermanent dielectric material which is employed to insulate conductivestructures. Depending on the material selection ILD 112 may not need tobe processed to become the permanent ILD 116 and may instead become thepermanent ILD 116 upon its formation (as layer ILD 112).

Curing, if needed, may be performed by a thermal cure, an electron beamcure, an ultra-violet (UV) cure, an ion beam cure, a plasma cure, amicrowave cure or a combination thereof The conditions for each of thecuring processes are well known to those skilled in the art and anycondition can be chosen as long as it converts the interlevel dielectriccomposition into a low k film and maintains pattern fidelity.

In one embodiment, an irradiation cure step is performed by acombination of a thermal cure and an ultra-violet (UV) cure wherein thewavelength of the ultra-violet (UV) light is from 50 nm to 300 nm andthe light source for the ultra-violet (UV) cure is a UV lamp, an excimer(exciplex) laser or a combination thereof. The excimer laser may begenerated from at least one of the excimers selected from the groupconsisting of Ar_(e)*, Kr₂*, F₂, Xe₂*, ArF, KrF, XeBr, XeCl, XeCl, XeF,CaF₂, KrCl, and Cl₂ wherein the wavelength of the excimer laser is inthe range from 50 nm to 300 nm. Additionally, the light of theultra-violet (UV) cure may be enhanced and/or diffused with a lens orother optical diffusing device known to those skilled in the art.

In one embodiment, this post patterning cure is a combined UV/thermalcure. This combined UV/thermal cure is carried on a UV/thermal curemodule under vacuum or inert atmosphere, such as N₂, He and Ar. TheUV/thermal cure temperature may be from 100° C. to 500° C., with a curetemperature from 300° C. to 450° C. being more common. The duration ofthe UV/thermal cure is from 0.5 min to 30 min with duration from 1 minto 10 min being more common. The UV cure module is designed to have avery low oxygen content to avoid degradation of the resultant dielectricmaterials. This post-patterning cure, if performed, may be in differentor the same tool cluster as that of the patterning step.

The thickness of the patterned and cured interlevel dielectric (ILD) 116may vary depending on the requirements of the chip and the techniqueused to form the same as well as the material make-up of the layer. Thepatterned and cured ILD 116 may have a thickness, e.g., from 1 nm to50000 nm, with a thickness from 10 nm to 5000 nm being preferable.

Referring again to FIG. 1G, if ARC 106 or cap layer 104 are employed, acap open process is employed to expose the underlying substrate 102 (ormetal lines). The cap open process preferably includes an etchingprocess that selectively etches one or both of the ARC 106 and/or caplayer 104 relative to the layer 116.

Referring to FIG. 1H, a metallization process includes depositing aconductor 120 into shaped openings 118 (FIG. 1G) in layer 116 and over atop surface of dielectric layer 116. The conductor 120 may includecopper, aluminum, tungsten, titanium, doped polysilicon or any otheruseful conductive material, or alloys/combinations thereof The conductor120 may be deposited using chemical vapor deposition (CVD) or otherdeposition techniques. The openings 118 are filled with conductivematerial 120 and include the shapes of the openings 118 as provided bythe image reversal.

Referring to FIG. 1I, a chemical-mechanical polish (CMP) is performed toremove excess conductor 120 from the surface of dielectric layer 116 toform a conductive structure (e.g., metal line or via) 122 in a singledamascene process. Other planarization processes may also be employed.

The structure 122 may include a trapezoidal cross-section, but mayinclude other graduated shapes or stepped shapes. in the presentexample, the structure 122 has less width at its upper portion and agreater width at its base. In this way, the upper portion is necked downto connect with a conductive structure in a higher layer (not shown).The reduction is size of the upper portion reduces the risk of shortsbetween neighboring conductive structures 122 and permits the structures122 to be taller than conventional structures. This further enablesincreased reliability in the device.

Referring to FIG. 1J, a cap deposition may be employed to form a caplayer 124 prior to beginning a next metallization layer for connectingthe substrate 102 (or lower metallization) to a higher conductor (notshown) using a single damascene integration.

The present process enables a wider choice of patterning materials,e.g., any spin-on ILD 112 may be employed. Well-developed resists andlithography techniques may be employed including both positive-tone,negative-tone resists. The present methods are compatible with immersionlithography and multi-exposure patterning. The present methods generatean ILD profile using resist materials and patterning, which are notpossible with ILD formation with etching alone. E.g., a super-verticalILD profile, an inverse ILD profile, etc. The present method offer waysto reduce Line Edge Roughness (LER) through post resist patterning cureprocesses.

Advantages of the present principles provide shaped interconnectstructures with improved electrical reliability as the distance betweenmetal portions at a top of particular dielectric level is a greaterdistance than traditional (square) structures. The integration processis simplified to save manufacturing costs by eliminating steps. Noreactive ion etching (RIE) is needed to form the shaped interconnectstructures, thus dielectric damage by RIE is reduced, and performanceand reliability are improved

Referring to FIG. 2A, after the planarizing step of FIG. 1E, anothermethod for forming single damascene structures is illustratively shown.The resist pattern 110, which may include a positive-tone photoresist,which is exposed to a blanket irradiation. The irradiation (and optionalsubsequent baking) causes chemical transformation in an exposed resist130 in FIG. 2B.

Referring to FIG. 2C, patterns (vias or trenches opened) 132 are formedby selective removal of the exposed areas by a liquid (development).This forms a pattern in the ILD 112 which is the shape of the removedmaterial.

Referring to FIG. 2D, a cure step as described with respect to FIG. 1Fmay be performed to convert the photoresist ILD 112 into the interleveldielectric layer 116 as described above, if needed. Processing continuesas in FIGS. 1G-FIG. 1J.

Referring to FIG. 3A, another illustrative embodiment may be employedfor dual-damascene structure integration. The process steps for thisembodiment follow those of FIGS. 1A-1F. Note the pitched sidewalls ofopening 215. In one embodiment, after curing the ILD 112 to form ILD 116(if needed), in FIG. 3A, a second photoresist 202 is formed on the ILDlayer 116 and fills an opening (215) formed by removing the photoresistfeatures 110. The second resist 202 may include a positive- ornegative-tone photoresist.

Referring to FIG. 3B, second resist 202 is patterned using apattern-wise exposure to irradiation, e.g., UV light, EUV, E-beam, etc.Dual damascene patterns 204 are formed by selective removal of theexposed (or unexposed) areas by a liquid (development).

Referring to FIG. 3C, ILD layer 206 (equivalent to layer 112) isdeposited to fill between resist structures 204 (only one is depicted).ILD composition 206 can be the same or different from ILD composition112. In FIG. 3D, a surface 208 of layer 206 is planarized to expose thesecond resist pattern 204 using the same method described in the singledamascene case. In FIG. 3E, the second resist 204 is developed orotherwise removed using the same method described in the singledamascene case. This leaves an open dual damascene structure 205 in theILD layer 206. The ILD 206 is then cured, if needed, by heat and/orirradiation energy (heat, UV, electron beam) to form a patterned andcured dielectric layer 210. In FIG. 3F, if present, an ARC layer 106and/or a cap layer 104 are opened up and a metallization process isperformed. The metallization process includes depositing a conductivematerial in open structure 205 (and opened ARC 106 and cap layer 104)and planarizing the conductive material to form a dual damasceneinterconnect 212. A cap layer 214 may be formed over the dual damasceneinterconnect structure 212. The process may be continued with otherlayers and back end or the line (BEOL) processing.

In one embodiment, the further processing may include the formation ofair gaps between dual damascene structures. Beginning with the structureof FIG. 3F, additional processing steps may take advantage of the curedsecond interlevel dielectric layer 210. Referring to FIG. 4A, a masklayer 302 is formed over the cap layer 212. The layer 302 may include aresist material or other compatible mask material.

In FIG. 4B, the mask layer 302 is patterned and holes 304 are opened upbetween dual damascene structures 212 through the cap layer 214 and intothe second dielectric layer 210. The mask layer 302 is removed as shownin FIG. 4C.

Referring to FIG. 4D, an etch process is performed to open up the seconddielectric layer 210 to form a larger air gap 308 between structures212. The etch process may include a reactive ion etch, or other suitableetching process. An ARC layer or other cap layer 214 may be formed by adeposition process to cap the air gap 308, and processing may continue.

The air gap formation process described with reference to FIG. 4 may beapplied to different structures. These structures may take advantage ofthe ability of the resist patterns/layers 210, 116 to provide differentvertical profiles for single damascene and dual damascene structures.Such profiles may include trapezoidal shapes, stepped shapes, asymmetricshapes, angled sidewalls, etc. Using the reverse imaging techniquesdescribed herein, the exposure process for resist materials is employedto form the cavities into which conductive structures are formed. Thisavoids the use of etching techniques to form these cavities and resultsin better dimensional accuracy and reliability of the conductivestructures.

In one example, a single damascene structure includes trapezoidalcross-sectional shaped metallization structures 402 depicted in FIG. 5A.FIG. 5B shows the trapezoidal shaped metallization 402 with an air gap404 formed between structures 402. A cap layer 124 (or ARC may be formedover the air gap 404). Note that the structures 402 may form lines witha trapezoidal cross-sections or may form contacts which would include afour-sided tapered structure narrowed at the top.

FIG. 6 shows a dual damascene structure 500, which includes atrapezoidal shaped via 502 formed in ILD 210. The dual damascenestructures 504 have an air gap 506 formed therebetween. The cap layer214 includes and ARC 508 formed thereon.

Having described preferred embodiments for interconnect structures andmethods for fabricating on-chip interconnect structures by imagereversal (which are intended to be illustrative and not limiting), it isnoted that modifications and variations can be made by persons skilledin the art in light of the above teachings. It is therefore to beunderstood that changes may be made in the particular embodimentsdisclosed which are within the scope of the invention as outlined by theappended claims. Having thus described aspects of the invention, withthe details and particularity required by the patent laws, what isclaimed and desired protected by Letters Patent is set forth in theappended claims.

1. An interconnect structure, comprising: at least one patterned andcured dielectric layer located directly on a surface of a patternedpermanent antireflective coating, the at least one patterned and cureddielectric layer and the permanent antireflective coating forming shapedopenings, the shaped openings including an inverse profile which narrowstowards a top of the shaped openings; and a conductive structure fillingthe shaped openings wherein the at least one patterned and cureddielectric layer and the permanent antireflective coating each have aconductively filled region.
 2. The interconnect structure as recited inclaim 1, wherein the at least one patterned and cured dielectric layeris a patterned and cured product of a dielectric composition comprisinga polymer, copolymer, or a blend including at least two of anycombination of polymers and/or copolymers.
 3. The interconnect structureas recited in claim 2, wherein the dielectric composition comprises apolymer, a copolymer, or a blend including at least two of anycombination of polymers and/or copolymers, wherein said polymers includeone monomer and the copolymers include at least two monomers and whereinthe monomers of the polymers and the monomers of the copolymers areselected from a siloxane, silane, carbosilane, oxycarbosilane,silsesquioxane, alkyltrialkoxysilane, tetra-alkoxysilane, unsaturatedalkyl substituted silsesquioxane, unsaturated alkyl substitutedsiloxane, unsaturated alkyl substituted silane, an unsaturated alkylsubstituted carbosilane, unsaturated alkyl substituted oxycarbosilane,carbosilane substituted silsesquioxane, carbosilane substitutedsiloxane, carbosilane substituted silane, carbosilane substitutedcarbosilane, carbosilane substituted oxycarbosilane, oxycarbosilanesubstituted silsesquioxane, oxycarbosilane substituted siloxane,oxycarbosilane substituted silane, oxycarbosilane substitutedcarbosilane, and oxycarbosilane substituted oxycarbosilane.
 4. Theinterconnect structure as recited in claim 1, wherein the permanentantireflective coating comprises atoms of M, carbon (C) and hydrogen (H)wherein M is at least one of Si, Ge, B, Sn, Fe, Ta, Ti, Ni, Hf and La.5. The interconnect structure as recited in claim 1, wherein theconductive structures include a trapezoidal cross-section.
 6. Theinterconnect structure as recited in claim 1, wherein the conductivestructures include at plurality of conductive structure and furthercomprising air gaps formed between the plurality of conductivestructures.
 7. The interconnect structure as recited in claim 1, whereinthe conductive structure includes one of a single damascene structureand a dual damascene structure.
 8. A method for fabricating aninterconnect structure comprising: forming a permanent antireflectivecoating on a substrate; forming a pattern of shaped photoresiststructures having a profile which narrows towards a top of the shapedstructures directly on the permanent antireflective coating; fillingspaces between the shaped photoresist structures with an interleveldielectric composition wherein without substantially altering a shapeand size of the shaped photoresist structures, and the interleveldielectric composition includes a material that becomes a permanentinterlevel dielectric layer; removing the shaped photoresist structuresto provide shaped openings to form a reverse image pattern in theinterlevel dielectric composition, the shaped openings having an inverseprofile which narrows towards a top of the shaped openings; and fillingthe vias and trenches with an electrically conductive fill material. 9.The method as recited in claim 8, further comprising forming adielectric cap between the substrate and the photoresist wherein thedielectric cap is opened prior to the filling step.
 10. The method asrecited in claim 8, wherein the interlevel dielectric compositionincludes at least one of a polymer, a copolymer, a blend including atleast two of any combination of polymers and/or copolymers, wherein thepolymers include one monomer and the copolymers include at least twomonomers and wherein the monomers of the polymers and the monomers ofthe copolymers are selected from: a siloxane, silane, carbosilane,oxycarbosilane, silsesquioxane, alkyltrialkoxysilane,tetra-alkoxysilane, unsaturated alkyl substituted silsesquioxane,unsaturated alkyl substituted siloxane, unsaturated alkyl substitutedsilane, an unsaturated alkyl substituted carbosilane, unsaturated alkylsubstituted oxycarbosilane, carbosilane substituted silsesquioxane,carbosilane substituted siloxane, carbosilane substituted silane,carbosilane substituted carbosilane, carbosilane substitutedoxycarbosilane, oxycarbosilane substituted silsesquioxane,oxycarbosilane substituted siloxane, oxycarbosilane substituted silane,oxycarbosilane substituted carbosilane, and oxycarbosilane substitutedoxycarbosilane.
 11. The method as recited in claim 10, furthercomprising curing the interlevel dielectric composition therebyconverting the interlevel dielectric composition into a patternedpermanent interlevel dielectric layer.
 12. The method as recited inclaim 11, wherein said curing the interlevel dielectric composition toconvert the interlevel dielectric composition into a patterned permanentinterlevel dielectric layer comprises a thermal cure, an electron beamcure, an UV cure, an ion beam cure, a plasma cure, a microwave cure orany combination thereof
 13. The method as recited in claim 8, furthercomprises forming at least one air gap in the permanent interleveldielectric layer between interconnect structures formed in the vias andtrenches.
 14. The method as recited in claim 8, wherein the electricallyconductive fill material forms shaped interconnect structures havingtapered sidewalls with an inverse profile which narrows towards a top ofthe shaped conductive structures.
 15. The method as recited in claim 8,further comprising removing excessive interlevel dielectric compositionfill to expose a top surface of the shaped photoresist structures by oneof a wet removal, a reactive ion etch or a combination of both.
 16. Amethod for fabricating an interconnect structure comprising: formingfirst shaped photoresist structures in a first photoresist wherein thefirst shaped photoresist structures include a profile which narrowstowards a top of the shaped photoresist structures; filling spacesbetween the first shaped photoresist structures with a first interleveldielectric composition wherein the filling does not substantially altera shape and size of the first shaped photoresist structures and thefirst interlevel dielectric composition includes a material to become afirst permanent interlevel dielectric layer; removing the first shapedphotoresist structures to provide a reverse image pattern forming firstshaped openings in the first interlevel dielectric composition, thefirst shaped openings including an inverse profile which narrows towardsa top of the first shaped openings; forming second photoresiststructures in a second photoresist on top of the first permanentinterlevel dielectric layer; filling spaces between the secondphotoresist structures with a second interlevel dielectric compositionwherein the filling does not substantially alter a shape and size of thesecond photoresist structures and the second interlevel dielectriccomposition includes a material to become a permanent interleveldielectric layer; removing the second photoresist structures to formsecond shaped openings to provide a reverse image pattern for forminginterconnect structures; and filling the reverse image pattern of thepermanent first and second interlevel dielectric layers with anelectrically conductive fill material to form interconnect structures.17. The method as recited in claim 16, further comprising forming thefirst photoresist on a substrate and forming a permanent antireflectivecoating between the substrate and the first photoresist wherein theantireflective coating is opened prior to the filling step.
 18. Themethod as recited in claim 16, further comprising forming the firstphotoresist on a substrate and forming a dielectric cap between thesubstrate and the first photoresist wherein the dielectric cap is openedprior to the filling step.
 19. The method as recited in claim 16,wherein at least one of the first and second interlevel dielectriccompositions includes at least one of a polymer, a copolymer, a blendincluding at least two of any combination of polymers and/or copolymers,wherein the polymers include one monomer and the copolymers include atleast two monomers and wherein the monomers of the polymers and themonomers of the copolymers are selected from: a siloxane, silane,carbosilane, oxycarbosilane, silsesquioxane, alkyltrialkoxysilane,tetra-alkoxysilane, unsaturated alkyl substituted silsesquioxane,unsaturated alkyl substituted siloxane, unsaturated alkyl substitutedsilane, an unsaturated alkyl substituted carbosilane, unsaturated alkylsubstituted oxycarbosilane, carbosilane substituted silsesquioxane,carbosilane substituted siloxane, carbosilane substituted silane,carbosilane substituted carbosilane, carbosilane substitutedoxycarbosilane, oxycarbosilane substituted silsesquioxane,oxycarbosilane substituted siloxane, oxycarbosilane substituted silane,oxycarbosilane substituted carbosilane, and oxycarbosilane substitutedoxycarbosilane.
 20. The method as recited in claim 19, furthercomprising curing the at least one of the first and second interleveldielectric compositions to convert the interlevel dielectric compositioninto a permanent interlevel dielectric layer.
 21. The method as recitedin claim 20, wherein the curing comprises at least one of a thermalcure, an electron beam cure, an ultraviolet (UV) cure, an ion beam cure,a plasma cure, a microwave cure or a combination thereof
 22. The methodas recited in claim 16, further comprising removing excess interleveldielectric composition to expose a top surface of at least one of thefirst shaped photoresist structures and/or the second photoresiststructures.
 23. The method as recited in claim 22, wherein removingexcessive interlevel dielectric composition includes one of a wetremoval, a reactive ion etch or a combination of both.
 24. The method asrecited in claim 16, wherein the conductive fill material formsinterconnect structures and the method further comprises forming airgaps in at least one of the first permanent interlevel dielectric layerand the second permanent interlevel dielectric layer between theinterconnect structures.
 25. The method as recited in claim 16, whereinthe conductive fill material forms interconnect structures havingtapered sidewalls with an inverse profile.